|
A bidirectional silicon micropump [192]
|
Electrostatic
|
7x7x2
|
850
|
0.31
|
2
|
200
|
|
A wireless implantable micropump for chronic drug infusion against cancer [194]
|
Electrolysis
|
20x15x7.1
|
2.66
|
0.69
|
–
|
3
|
|
Design and test of a high-performance piezoelectric micropump for drug delivery [207]
|
Piezoelectric
|
–
|
3.5 × 103
|
27
|
3
|
50
|
|
An Electromagnetically-Actuated All-PDMS Valveless Micropump for Drug Delivery [208]
|
Electromagnetic
|
20x12x3.5
|
319.6
|
0.95
|
36.9 × 10− 3
|
–
|
|
A self-priming, roller-free, miniature, peristaltic pump operable with a single, reciprocating actuator [209]
|
Peristaltic
|
8x22x35
|
780
|
48
|
–
|
3
|
|
A low cost, high performance insulin delivery system based on PZT actuation [210]
|
Piezoelectric
|
22 × 18 × 6
|
4.34 × 103
|
14.64
|
0.2
|
36
|
|
An Ultrasonically Powered Micropump for On-Demand In-Situ Drug Delivery [211]
|
Piezoelectric
|
22x7x5
|
13.8
|
4
|
–
|
–
|
|
Characteristic studies of the piezoelectrically actuated micropump with check valve [212]
|
Piezoelectric
|
10x10x1
|
1.82 × 103
|
32
|
160
|
120
|
|
Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications [193]
|
Electrostatic
|
7x4x1
|
9.1
|
–
|
50
|
18.5
|
|
Piezoelectric micro-pump with PZT thin film for low consumption microfluidic devices [213]
|
Piezoelectric
|
30 × 7.5 × 0.15
|
3.6
|
4
|
1
|
24
|
|
An Implantable MEMS Micropump System for Drug Delivery in Small Animals [195]
|
Electrolysis
|
–
|
34
|
1.31
|
–
|
3
|
|
Piezoelectric Micropump with Nanoliter Per Minute Flow for Drug Delivery Systems [214]
|
Piezoelectric
|
12x6x0.5
|
4.98 × 10−3
|
–
|
0.67
|
16
|
|
Design and simulation of an implantable medical drug delivery system using microelectromechanical systems technology [215]
|
Peristaltic
|
70x35x1
|
–
|
–
|
–
|
100
|
|
A PMMA valveless micropump using electromagnetic actuation [216]
|
Electromagnetic
|
–
|
400
|
1.2
|
12 × 10−3
|
–
|
|
A low voltage silicon micro-pump based on piezoelectric thin films [191]
|
Piezoelectric
|
30 × 7.5 × 0.15
|
3.5
|
3.2
|
1
|
24
|
|
Study on a piezoelectric micropump for the controlled drug delivery system [217]
|
Piezoelectric
|
–
|
52
|
–
|
0.4
|
140
|
