Title | Mechanism | Size (mm) | Flow Rate (μl/min) | Pressure (kPa) | Frequency (kHz) | Voltage (V) |
---|---|---|---|---|---|---|
A bidirectional silicon micropump [192] | Electrostatic | 7x7x2 | 850 | 0.31 | 2 | 200 |
A wireless implantable micropump for chronic drug infusion against cancer [194] | Electrolysis | 20x15x7.1 | 2.66 | 0.69 | – | 3 |
Design and test of a high-performance piezoelectric micropump for drug delivery [207] | Piezoelectric | – | 3.5 × 103 | 27 | 3 | 50 |
An Electromagnetically-Actuated All-PDMS Valveless Micropump for Drug Delivery [208] | Electromagnetic | 20x12x3.5 | 319.6 | 0.95 | 36.9 × 10− 3 | – |
A self-priming, roller-free, miniature, peristaltic pump operable with a single, reciprocating actuator [209] | Peristaltic | 8x22x35 | 780 | 48 | – | 3 |
A low cost, high performance insulin delivery system based on PZT actuation [210] | Piezoelectric | 22 × 18 × 6 | 4.34 × 103 | 14.64 | 0.2 | 36 |
An Ultrasonically Powered Micropump for On-Demand In-Situ Drug Delivery [211] | Piezoelectric | 22x7x5 | 13.8 | 4 | – | – |
Characteristic studies of the piezoelectrically actuated micropump with check valve [212] | Piezoelectric | 10x10x1 | 1.82 × 103 | 32 | 160 | 120 |
Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications [193] | Electrostatic | 7x4x1 | 9.1 | – | 50 | 18.5 |
Piezoelectric micro-pump with PZT thin film for low consumption microfluidic devices [213] | Piezoelectric | 30 × 7.5 × 0.15 | 3.6 | 4 | 1 | 24 |
An Implantable MEMS Micropump System for Drug Delivery in Small Animals [195] | Electrolysis | – | 34 | 1.31 | – | 3 |
Piezoelectric Micropump with Nanoliter Per Minute Flow for Drug Delivery Systems [214] | Piezoelectric | 12x6x0.5 | 4.98 × 10−3 | – | 0.67 | 16 |
Design and simulation of an implantable medical drug delivery system using microelectromechanical systems technology [215] | Peristaltic | 70x35x1 | – | – | – | 100 |
A PMMA valveless micropump using electromagnetic actuation [216] | Electromagnetic | – | 400 | 1.2 | 12 × 10−3 | – |
A low voltage silicon micro-pump based on piezoelectric thin films [191] | Piezoelectric | 30 × 7.5 × 0.15 | 3.5 | 3.2 | 1 | 24 |
Study on a piezoelectric micropump for the controlled drug delivery system [217] | Piezoelectric | – | 52 | – | 0.4 | 140 |